Manufacturer: SUSS
Model: MicroTec Gamma
Year of Manufacture: 2010
CE Marked: Yes
Electrical Specifications:
- Voltage: 400V, 3-phase +N+PE
- Power: 22 kVA, 50 Hz
- AIC: 100 kA / 400V
- FLC: 32 A
Pneumatic Requirements:
- CDA (Clean Dry Air): 5 bar
- Nitrogen (N₂): 5 bar
- Vacuum (VAC): -0.8 bar
- Deionized Water (DIW): 5 bar
System Overview:
High-performance automated coater/developer system designed for
semiconductor and MEMS processing. Ideal for 4" to 8" wafers.
- Wafer Size: 4-fold I/O for 4"–8" wafers
- Software: Version 4.41c(23)
- Operating System: Windows XP Professional, Version 2002, Service
Pack 3
- Processor: 2.0 GHz
- Memory: 500 MB RAM
Configuration :
- 4-fold I/O with Sankio double gripper
- 2 Developer Modules (1 medium size)
- 1 Coating Module (2 lacquers, IDI)
- 7 Hot Plates (HP)
- 2 Chill Plates (CP)
- 1 Flood Exposure Unit
- Mechanical Centering
- Media Cabinet
- Control Cabinet
- 4x Julabo Temperature Controllers
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